TK7836 .I39
621.3815/2
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IEEE transactions on semiconductor manufacturing : a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council.
— New York, N.Y. : Institute of Electrical and Electronics Engineers, c1988- v. : il. ; 28 cm.
Título de cubierta.
ISSN 0894-6507
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