Importante! Sobre el catálogo
| LDR | ·····cas##22·····#a#4500 |
| 001 | 000226 |
| 005 | 20110404115555.0 |
| 007 | cr#unu |
| 008 | 870709c19889999nyuqr#p#######0###a0eng#d |
| 210 | 0# | $a IEEE trans. semicond. manuf. |
| 222 | #0 | $a IEEE transactions on semiconductor manufacturing |
| 245 | 00 | $a IEEE transactions on semiconductor manufacturing : $b a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council. |
| 260 | ## | $a New York, N.Y. : $b Institute of Electrical and Electronics Engineers, $c c1988- |
| 300 | ## | $a v. : $b il. ; $c 28 cm. |
| 310 | ## | $a Quincenal |
| 362 | 0# | $a Vol. 1, no. 1 (Feb. 1988)- |
| 500 | ## | $a Título de cubierta. |
| 530 | ## | $a Disponible además en microfilm |
| 776 | 0# | $t IEEE transactions on semiconductor manufacturing (Online) $x 1558-2345 |
| 022 | 0# | $a 0894-6507 $l 0894-6507 |
| 710 | 2# | $a IEEE Components, Hybrids, and Manufacturing Technology Society. $4 aut |
| 710 | 2# | $a IEEE Electron Devices Society.x. $4 aut |
| 710 | 2# | $a IEEE Reliability Society. $4 aut |
| 710 | 2# | $a IEEE Solid-State Circuits Council. $4 aut |
| 710 | 2# | $a Institute of Electrical and Electronics Engineers. $4 aut |
| 246 | 3# | $a Institute of Electrical and Electronics Engineers transactions on semiconductor manufacturing |
| 246 | 30 | $a Transactions on semiconductor manufacturing |
| 246 | 30 | $a Semiconductor manufacturing |
| 082 | 00 | $a 621.3815/2 $2 19 |
| 650 | #0 | $a Semiconductors $x Design and construction $v Periodicals. |
| 653 | ## | $a Semiconductores. |
| 010 | ## | $a ###88659341# $z sn#87002625# |
| 040 | ## | $a NSDP $c NSDP $d N $d NSDP $d OCoLC $d NSDP $d NIC $d DLC $d NSDP $d NST $d DLC $d NST $d MH $d NST $d InU $d MCM $d CU-S $d OCoLC $d MCM $d MH $d CU-S $d NSDP |
| 032 | ## | $a 001891 $b USPS |
| 037 | ## | $b IEEE Service Center, 445 Hoes Lane, P.O. Box 1331, Piscataway, NJ 08855-1331 |
| 050 | 00 | $a TK7836 $b .I39 |
| 856 | ## | $u http://ieeexplore.ieee.org/servlet/opac?punumber=66 $y Acceso Web |
| 866 | #0 | $a . . |
| 866 | #0 | $a . . |