IEEE transactions on semiconductor manufacturing : a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council.
Vol. 1, no. 1 (Feb. 1988) –
New York, N.Y. : Institute of Electrical and Electronics Engineers, ©1988-
v. : ilustraciones ; 28 cm.
ISSN: 0894-6507
Título de cubierta.
Disponible además en microfilm